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70 Cm Radio Frequency Hollow Cathode Plasma Source for Modification of Foils and Membranes by D. Korzec; M. Mildner; F. Hillemann; J. Engemann is a Engineering article available to read on EtoBox.

What is 70 Cm Radio Frequency Hollow Cathode Plasma Source for Modification of Foils and Membranes about?

For industrial use long linear plasma sources are needed. Basing on a radio frequency (13.56 MHz) hollow cathode discharge (HCD) concept proved for 30 cm long cathodes, an upscaled version of the plasma source with cathode length of 70 cm was developed. Additional hollow anode plasma chambers allow easier switching to an HCD discharge mode. Holes between anode and cathode plasmas cause a local increase in the ion concentration by a factor of 40 (up to 2×1011 cm-3). Homogeneity of the cathode plasma was examined by use of a double Langmuir probe technique. It improves with increasing number of holes distributed along the cathode trench. To characterize the process uniformity, polypropylene foil and cellulose membrane were used. Typical process conditions are RF power of 600 W, argon flow 60 sccm, pressure in the process chamber 0.1 Pa. The contact angle measured with water on the polypropylene surface decreases from 100°to 50°after 2 s of treatment in plasma with ion concentrations of more than 2×1010 cm-3. The distributions of the contact angle over the foil width show minima for places of maximum ion concentration and are almost identical on both foil sides. The intensity of the s

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Author

D. Korzec; M. Mildner; F. Hillemann; J. Engemann

Publisher

Elsevier Science; Elsevier ; Elsevier BV (ISSN 0257-8972)

Published

1997

Language

EN

Field

Engineering (Physical Sciences)