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About this Engineering article
Influences of relative humidity on the quality factors of MEMS cantilever resonators in gas rarefaction by Nguyen, Chi Cuong; Ngo, Vo Ke Thanh; Le, Hoai Quoc; Li, Wang Long is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Nguyen, Chi Cuong; Ngo, Vo Ke Thanh; Le, Hoai Quoc; Li, Wang Long
- Publisher
- Springer-Verlag; Springer Verlag; Springer Science and Business Media LLC (ISSN 0946-7076)
- Published
- 2018
- Field
- Engineering (Physical Sciences)
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