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About this Engineering article
Localized removal of the Au–Si eutectic bonding layer for the selective release of microstructures by Gradin, Henrik; Braun, Stefan; Stemme, Göran; van der Wijngaart, Wouter is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Gradin, Henrik; Braun, Stefan; Stemme, Göran; van der Wijngaart, Wouter
- Publisher
- Institute of Physics; IOP Publishing; Institute of Physics Publishing; ScienceOpen (ISSN 0960-1317)
- Published
- 2009
- Language
- EN
- Field
- Engineering (Physical Sciences)
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