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About this Engineering article
A resonant microstructure tunability analysis for an out-of-plane capacitive detection MEMS magnetometer by Said, Mohamed Hadj; Tounsi, Farès; Gkotsis, Petros; Mezghani, Brahim; Francis, Laurent A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Said, Mohamed Hadj; Tounsi, Farès; Gkotsis, Petros; Mezghani, Brahim; Francis, Laurent A.
- Publisher
- Springer-Verlag; Springer Verlag; Springer Science and Business Media LLC (ISSN 0946-7076)
- Published
- 2016
- Field
- Engineering (Physical Sciences)