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About this Engineering article
Separation by ion implantation of oxygen (SIMOX) structures: estimating thicknesses by Marchiando, J. F. ;Geist, Jon is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Marchiando, J. F. ;Geist, Jon
- Publisher
- The Optical Society; Optical Society of America (ISSN 1559-128X)
- Published
- 1992
- Field
- Engineering (Physical Sciences)