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About this Engineering article
Tungsten nitride thin films prepared by MOCVD by Chiu, Hsin-Tien; Chuang, Shiow-Huey is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Chiu, Hsin-Tien; Chuang, Shiow-Huey
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP); Research Square (ISSN 0884-2914)
- Published
- 1993
- Language
- EN
- Field
- Engineering (Physical Sciences)