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About this Materials Science article
Enhanced thermal sensitivity of MEMS bolometers integrated with nanometer-scale hole array structures by Zhang, Ya; Qiu, Boqi; Nagai, Naomi; Nomura, Masahiro; Volz, Sebastian; Hirakawa, Kazuhiko is a Materials Science article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Zhang, Ya; Qiu, Boqi; Nagai, Naomi; Nomura, Masahiro; Volz, Sebastian; Hirakawa, Kazuhiko
- Publisher
- American Institute of Physics; American Institute of Physics Inc.; Melville NY: American Institute of Physics; AIP Publishing (ISSN 2158-3226)
- Published
- 2019
- Language
- EN
- Field
- Materials Science (Physical Sciences)