Can I read Semiconductor Manufacturing Technology on EtoBox?

Semiconductor Manufacturing Technology by Michael Quirk, Julian Serda is a nonfiction available to read on EtoBox.

What is Semiconductor Manufacturing Technology about?

In this book, Quirk and Serda introduce the terminology, concepts, processes, products, and equipment commonly used in the manufacture of ultra large scale integrated (ULSI) semiconductors. The book provides helpful, up-to-date technical information about semiconductor manufacturing and strikes an effective balance between the process and equipment technology found in wafer fabrications. Topics include copper interconnect; dual damascene additive process for metallization; deep UV sub-micron photolithography (.18 micron and below); low-k dielectric processing; chemical mechanical planarization; a comprehensive model of manufacturing process; chemical-mechanical polish (CMP); and maintenance and troubleshooting. For practicing semiconductor manufacturing technicians or those interested in semiconductor manufacturing technology and processes.

Who reads Semiconductor Manufacturing Technology?

Author

Michael Quirk, Julian Serda

Publisher

Prentice Hall

Published

2000

Language

EN

ISBN

9780130815200

Category

nonfiction

Subjects

Engineering, Technology, Science

Rating

4.6 / 5 (23 ratings)

Updated

2026-03-14