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Property Improvement of 75 nm-thick Directly-crystallized SrBi2Ta2O9 Thin Films by Pulse-introduced Metalorganic Chemical Vapor Deposition at Low Temperature by M. Mitsuya; N. Nukaga; T. Watanabe; H. Funakubo; K. Saito is a Engineering article available to read on EtoBox.

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Author
M. Mitsuya; N. Nukaga; T. Watanabe; H. Funakubo; K. Saito
Publisher
Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
Published
2001
Field
Engineering (Physical Sciences)

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