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About this Engineering article
Controlled growth of 3C-SiC and 6H-SiC films on low-tilt-angle vicinal (0001) 6H-SiC wafers by J. A. Powell; J. B. Petit; J. H. Edgar; I. G. Jenkins; L. G. Matus; J. W. Yang; P. Pirouz; W. J. Choyke; L. Clemen; M. Yoganathan is a Engineering article available to read on EtoBox.
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- Author
- J. A. Powell; J. B. Petit; J. H. Edgar; I. G. Jenkins; L. G. Matus; J. W. Yang; P. Pirouz; W. J. Choyke; L. Clemen; M. Yoganathan
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1991
- Field
- Engineering (Physical Sciences)