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IntechOpen is a leading publisher of Open Access books with over 3,700 titles and contributions from 108,500 international authors. The document discusses the development of a high sensitive piezoresistive cantilever MEMS based sensor, emphasizing the importance of finite element analysis in optimizing MEMS design and performance. It also explores the piezoresistive effect in silicon and various design approaches to enhance sensor sensitivity.

Author

Karthik Bollu

Language

EN