Opening book details…
About this Engineering article
Continuous compositional spread investigation of SiC-based thin films prepared by MW-ECR plasma enhanced magnetron co-sputtering by WANG, Hanghang; ZHANG, Liyan; LU, Wenqi; XU, Jun is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- WANG, Hanghang; ZHANG, Liyan; LU, Wenqi; XU, Jun
- Publisher
- IOP Publishing; Institute of Physics Publishing (ISSN 1009-0630)
- Published
- 2020
- Language
- EN
- Field
- Engineering (Physical Sciences)
More by WANG, Hanghang; ZHANG, Liyan; LU, Wenqi; XU, Jun
Browse all works by WANG, Hanghang; ZHANG, Liyan; LU, Wenqi; XU, Jun