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About this Engineering article
Two-Dimensional Distributions of Ti and Ti + Densities in High-Pressure Magnetron Sputtering Discharges by Nafarizal, Nayan; Takada, Noriharu; Shibagaki, Kanji; Nakamura, Keiji; Sago, Yasumi; Sasaki, Koichi is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Nafarizal, Nayan; Takada, Noriharu; Shibagaki, Kanji; Nakamura, Keiji; Sago, Yasumi; Sasaki, Koichi
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2005
- Language
- EN
- Field
- Engineering (Physical Sciences)