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About this Engineering article
Optimization of UHV-CVD Thin Films for Gate Dielectric Applications by Rogers, Bridget R.; Song, Zhe; Geil, Robert D.; Weller, Robert A. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Rogers, Bridget R.; Song, Zhe; Geil, Robert D.; Weller, Robert A.
- Publisher
- Trans Tech Publications Inc.; Trans Tech Publications, Ltd. (ISSN 1662-0356)
- Published
- 2006
- Language
- EN
- Field
- Engineering (Physical Sciences)
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