About this scholarly article

ECS Transactions - La2O3 Gate Dielectric Thin Film with Sc2O3 Buffer Layer for High Temperature Annealing by Shiino, Yasuhiro; Kakushima, Kuniyuki; Ahmet, Parhat; Tsutsui, Kazuo; Sugii, Nobuyuki; Hattori, Takeo; Iwai, H. is a scholarly article available to read on EtoBox.

Author

Shiino, Yasuhiro; Kakushima, Kuniyuki; Ahmet, Parhat; Tsutsui, Kazuo; Sugii, Nobuyuki; Hattori, Takeo; Iwai, H.

Publisher

ECS

Published

2006

Language

EN