Can I read Enhancement of TiC/stainless steel interfaces by N + -implantation on EtoBox?

Enhancement of TiC/stainless steel interfaces by N + -implantation by T.W. Kang; C.Y. Hong; C.K. Chung; T.W. Kim is a Engineering article available to read on EtoBox.

What is Enhancement of TiC/stainless steel interfaces by N + -implantation about?

TiC ®lms were deposited on stainless-steel substrates by the reactive radio-frequency magnetron sputtering technique, and N 1 implantation were performed to enhance the quality of the TiC/stainless steel interface. The deposition rate of the TiC ®lm increased linearly with increasing applied radio-frequency power, and it decreased with increasing partial-pressure ratio of the sputtering gas to the reactive gas. The stoichiometry of the TiC ®lms and the interfacial depth pro®les of the TiC/stainless steel heterostructures were investigated by Auger electron spectroscopy measurements. Removal of the oxygen at the TiC/stainless steel interface due to N 1 -implantation and annealing were observed. These results indicate that the N 1 -implanted TiC thin ®lms grown on stainless-steel substrates can be used for advanced engineering ceramic applications.

Who reads Enhancement of TiC/stainless steel interfaces by N + -implantation?

Author

T.W. Kang; C.Y. Hong; C.K. Chung; T.W. Kim

Publisher

Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)

Published

1999

Language

EN

Field

Engineering (Physical Sciences)