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About this Engineering article
Influence of substrate temperature and N 2 /Ar flow ratio on the stoichiometry, structure and hardness of TaNx coatings deposited by DC reactive sputtering by Valdez, K.; Espinosa-Arbeláez, D. G.; García-Herrera, J. E.; Muñoz-Saldaña, J.; Farias, M. H.; De la Cruz, W. is a Engineering article available to read on EtoBox.
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- Author
- Valdez, K.; Espinosa-Arbeláez, D. G.; García-Herrera, J. E.; Muñoz-Saldaña, J.; Farias, M. H.; De la Cruz, W.
- Publisher
- John Wiley and Sons; Wiley (John Wiley & Sons); John Wiley & Sons Inc.; Wiley; Research Square (ISSN 0142-2421)
- Published
- 2015
- Language
- EN
- Field
- Engineering (Physical Sciences)