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Preparation and characterization of highly c-axis-oriented Bi4Ti3O12 thin films by Masaki Yamaguchi; Kensuke Kawanabe; Takao Nagatomo; Osamu Omoto is a Materials Science article available to read on EtoBox.
What is Preparation and characterization of highly c-axis-oriented Bi4Ti3O12 thin films about?
Highly ccasis-oriented bismt~th titanatc (Hi,Ti,O,,) thin films \+t're prqx~red on ( IO())-oricntd silicon wa~w by 1-t' planar magnetron hputtcring wing 21 target of I3i,,TiO, ceramic at a IOU substrate tcmptxlttlrc of 600°C. The films nit11 a c,-asis orientation up to 9' Ib were obtained under hIgli deposition rate opprosimatd~ t I 11m Ii '. Dielectric constant ol'tlicse lilms Bert: depe~~clc~x~ of film thickness. This beha\~ior M'XS explainrd xsuming 21 lo\~-dielectric-constant intetfacc layer. L:sing this asxumption. tllr dielectric constant 01' Bi,Ti 10,2 film M:IS cstimatcd to be apprwimatel)~ IJO. This value ir, similar to that dong the c -asis in ;I bulk l'orm. ,4 /I E tl! stcrcsis characteristic has been obscrced at room tt'mprrature. The rcmancnt polariation and the coercive field art' 0.S \IC cm ' and 70 kV cm '. respectively. Frtmi analysis 01' rcfractiw index. interface layer \\\iih conlirtned an osidi/ed hilicoti. \vtiicti has l'wiicd hd0re and or dliritig film deposition.
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It is typically read by researchers, students, and practitioners in Materials Science.
- Author
- Masaki Yamaguchi; Kensuke Kawanabe; Takao Nagatomo; Osamu Omoto
- Publisher
- Elsevier Science; Elsevier ; Elsevier Ltd; Elsevier BV (ISSN 0921-5107)
- Published
- 1996
- Language
- EN
- Field
- Materials Science (Physical Sciences)