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About this scholarly article
Multipurpose Plasma Generator Suitable for Diamondlike Carbon Film Formation by Varga, I. K. is a scholarly article available to read on EtoBox.
- Author
- Varga, I. K.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 1989
- Language
- EN