About this scholarly article

2015 26th Annual SEMI Advanced Semiconductor Manufacturing Conference (ASMC) - Use of simulation studies to overcome key challenges in the fab automation of a 300 mm power semiconductor pilot line comprising thin-wafer processing by Schneider, Germar; Wagner, Thomas; Kraft, Martin is a scholarly article available to read on EtoBox.

Author

Schneider, Germar; Wagner, Thomas; Kraft, Martin

Publisher

IEEE

Published

2015

Language

EN