About this scholarly article

Digest of Papers. 2004 International Microprocesses and Nanotechnology Conference, 2004. - Impact of long-period line-edge roughness (LER) on accuracy in critical dimension (CD) measurement and a new guideline for cd metrology by Ywiaguechi, A.; Fukuda, H.; Kawada, H.; Iizura, T. is a scholarly article available to read on EtoBox.

Author

Ywiaguechi, A.; Fukuda, H.; Kawada, H.; Iizura, T.

Publisher

IEEE

Published

2004

Language

EN