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Polysilicon: Mechanical Properties by H. Kahn; A.H. Heuer is a book available to read on EtoBox.
What is Polysilicon: Mechanical Properties about?
Polysilicon is the most widely used structural material for surface-micromachined microsystems and microelectromechanical systems (MEMS) and is the focus of this article, which summarizes the physical properties, microstructure, and residual stresses in polysilicon thin films.
- Author
- H. Kahn; A.H. Heuer
- Publisher
- Elsevier
- Published
- 2001
- Language
- EN
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