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About this Engineering article

Nano Scale Material Property Measurement of MEMS Material Using Piezo Actuated Material Testing Machine by Lee, Hye Jin; Lee, Nak Kyu; Lee, Hyoung Wook; Park, Hoon Jae; Choi, Tae Hoon is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Lee, Hye Jin; Lee, Nak Kyu; Lee, Hyoung Wook; Park, Hoon Jae; Choi, Tae Hoon
Publisher
Trans Tech Publications, Ltd.; Trans Tech Publications Ltd. (ISSN 1662-9752)
Published
2006
Language
EN
Field
Engineering (Physical Sciences)

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