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Thermomechanical finite element modeling of Cu-SiO2 direct hybrid bonding with a dishing effect on Cu surfaces by Beilliard, Y.; Estevez, R.; Parry, G.; McGarry, P.; Di Cioccio, L.; Coudrain, P. is a Engineering article available to read on EtoBox.

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Author
Beilliard, Y.; Estevez, R.; Parry, G.; McGarry, P.; Di Cioccio, L.; Coudrain, P.
Publisher
Elsevier Science; Elsevier ; Elsevier Ltd.; Elsevier BV (ISSN 0020-7683)
Published
2017
Language
EN
Field
Engineering (Physical Sciences)

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