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What is EUV Lithography: Key to Logic and Memory about?

EUV lithography is a key technology for continuing the scaling of logic and memory chips. It allows the semiconductor industry to shrink circuit dimensions and increase functionality. EUV lithography is being inserted as the mainstream patterning solution for the 7nm node in logic and is expected to be used for the 1x node in DRAM production starting in 2024. Continued progress is needed in EUV resist resolution, sensitivity, and line edge roughness to enable further scaling. Reliability of EUV light source

Author

Gary Ryan Donovan

Language

EN