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About this Engineering article
Summary Abstract: A quantitative ion beam process applied to the deposition of aluminum nitride thin films by Harper, J. M. E. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Harper, J. M. E.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 1984
- Language
- EN
- Field
- Engineering (Physical Sciences)