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About this Engineering article
Remote Plasma Nitridation of In-Situ Steam Generated (ISSG) Oxide by Al-Shareef, H.N.; Karamcheti, A.; Luo, T.Y.; Brown, G.A.; Watt, V.H.C.; Jackson, M.D.; Huff, H.R.; Jallepally, R.; Noble, D.; Tam, N.; Miner, G. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Al-Shareef, H.N.; Karamcheti, A.; Luo, T.Y.; Brown, G.A.; Watt, V.H.C.; Jackson, M.D.; Huff, H.R.; Jallepally, R.; Noble, D.; Tam, N.; Miner, G.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 2000
- Field
- Engineering (Physical Sciences)