About this scholarly article

SPIE Proceedings [SPIE International Symposium on Microelectronics and MEMS - Adelaide, Australia (Monday 17 December 2001)] Electronics and Structures for MEMS II - Thin film characterization using terahertz differential time-domain spectroscopy and double modulation by Mickan, Samuel P.; Lee, Kwang-Su; Lu, Toh-Ming; Barnat, Edward; Munch, Jesper; Abbott, Derek; Zhang, Xi-Cheng; Bergmann, Neil W.; Abbott, Derek; Hariz, Alex; Varadan, Vijay K. is a scholarly article available to read on EtoBox.

Author

Mickan, Samuel P.; Lee, Kwang-Su; Lu, Toh-Ming; Barnat, Edward; Munch, Jesper; Abbott, Derek; Zhang, Xi-Cheng; Bergmann, Neil W.; Abbott, Derek; Hariz, Alex; Varadan, Vijay K.

Publisher

SPIE

Published

2001

Language

EN