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Ultra-Thin SOI/BOX Layers and Next Generations Planar Fully Depleted Substrates by Schwarzenbach, W.; Barec, V.; Cauchy, X.; Daval, N.; Kerdiles, S.; Boedt, F.; Bonnin, O.; Nguyen, B.-Y.; Maleville, C. is a Engineering article available to read on EtoBox.

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Author
Schwarzenbach, W.; Barec, V.; Cauchy, X.; Daval, N.; Kerdiles, S.; Boedt, F.; Bonnin, O.; Nguyen, B.-Y.; Maleville, C.
Publisher
The Electrochemical Society; Electrochemical Society, Inc. (ISSN 1938-6737)
Published
2012
Field
Engineering (Physical Sciences)

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