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About this Engineering article
Summary Abstract: High-contrast end point detection and plasma diagnostics for the polysilicon/oxide interface by Monahan, Kevin M. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Monahan, Kevin M.
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-2101)
- Published
- 1984
- Field
- Engineering (Physical Sciences)