About this scholarly article

SPIE Proceedings [SPIE Second International Symposium on Laser Precision Micromachining - Singapore, Singapore (Wednesday 16 May 2001)] Second International Symposium on Laser Precision Microfabrication - High-accuracy laser mask repair technology using ps UV solid state laser by Morishige, Yukio; Miyamoto, Isamu; Lu, Yong Feng; Sugioka, Koji; Dubowski, Jan J. is a scholarly article available to read on EtoBox.

Author

Morishige, Yukio; Miyamoto, Isamu; Lu, Yong Feng; Sugioka, Koji; Dubowski, Jan J.

Publisher

SPIE

Published

2002

Language

EN