About this scholarly article

International Conference on Advanced Nanomaterials & Emerging Engineering Technologies - Numerical simulation of dry and wet oxidation of Silicon by TCAD Sprocess by Anusha, A; Parameswaran, Chithra; Revathi, P; Velmurugan, V. is a scholarly article available to read on EtoBox.

Author

Anusha, A; Parameswaran, Chithra; Revathi, P; Velmurugan, V.

Publisher

IEEE

Published

2013