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A Stagnant Layer Model for the Epitaxial Growth of Silicon from Silane in a Horizontal Reactor by Eversteyn, F. C.; Severin, P. J. W.; v. d. Brekel, C. H. J.; Peek, H. L. is a Engineering article available to read on EtoBox.

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Author
Eversteyn, F. C.; Severin, P. J. W.; v. d. Brekel, C. H. J.; Peek, H. L.
Publisher
The Electrochemical Society; Electrochemical Society, Inc. (ISSN 0013-4651)
Published
1970
Field
Engineering (Physical Sciences)

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