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Joint university and industry investigation of polyimide for thin film organic dielectrics for VLSI interlevel applications by Hesler, K.H.; Fuller, L.F.; Yue, C.; Taylor, D.; Popli, S.; Capo, D.J.; Rossi, R.D. is a scholarly article available to read on EtoBox.

Author
Hesler, K.H.; Fuller, L.F.; Yue, C.; Taylor, D.; Popli, S.; Capo, D.J.; Rossi, R.D.
Publisher
IEEE
Published
1989
Language
EN