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What is Cylindrical Magnetron Specifications about?

This document provides specifications for cylindrical magnetrons, including cooling requirements, maximum input temperature, magnetic enhancement, mounting, and source to substrate distance. It lists the maximum sputtering power, cathode voltage, and discharge current for DC and MF operation. Target details such as cooling, diameter, and fixation are also specified. A disclaimer notes that all magnets are encapsulated and protected from water degradation, and that maximum power levels depend on the target m

Author

Meghjit Mazumder

Language

EN