About this Engineering article
A Study on High Speed Nanometer Positioning Table System. Realization of Ultraprecision Positioning Using a Repetitive Control Method. by YOSHIOKA, Hayato; HASHIZUME, Hitoshi; SHINNO, Hidenori is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- YOSHIOKA, Hayato; HASHIZUME, Hitoshi; SHINNO, Hidenori
- Publisher
- The Japan Society of Mechanical Engineers; Japan Society of Mechanical Engineers/Nihon Kikai Gakkai; Japan Society of Mechanical Engineers (ISSN 0387-5024)
- Published
- 2001
- Field
- Engineering (Physical Sciences)