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About this Engineering article

A Study on High Speed Nanometer Positioning Table System. Realization of Ultraprecision Positioning Using a Repetitive Control Method. by YOSHIOKA, Hayato; HASHIZUME, Hitoshi; SHINNO, Hidenori is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
YOSHIOKA, Hayato; HASHIZUME, Hitoshi; SHINNO, Hidenori
Publisher
The Japan Society of Mechanical Engineers; Japan Society of Mechanical Engineers/Nihon Kikai Gakkai; Japan Society of Mechanical Engineers (ISSN 0387-5024)
Published
2001
Field
Engineering (Physical Sciences)