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About this Engineering article
Nitriding of Evaporated-Ti Thin Films by Ion Implantation by Kasukabe, Yoshitaka; Ootubo, Junichi; Nagata, Shinji; MokuyoshiKishimoto, ; Fujino, Yutaka; Yamaguchi, Sadae; YukioYamada, is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kasukabe, Yoshitaka; Ootubo, Junichi; Nagata, Shinji; MokuyoshiKishimoto, ; Fujino, Yutaka; Yamaguchi, Sadae; YukioYamada,
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 1995
- Field
- Engineering (Physical Sciences)