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This document discusses photolithography, which is the process of transferring geometric patterns from a photo-mask onto a substrate using radiation. It is a cornerstone technique in integrated circuit fabrication. The process involves coating a substrate with photoresist, aligning and exposing the substrate to the photo-mask pattern, developing the photoresist, and etching the substrate. There are two main types of photoresist - positive and negative - which determine whether the exposed or unexposed areas

Author

Noel Prashant

Language

EN