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About this Engineering article
Chemical Mapping of Polymer Photoresists by Scanning Transmission X-ray Microscopy by L. Muntean; R. Planques; A. L. D. Kilcoyne; S. R. Leone; M. K. Gilles; W. D. Hinsberg is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- L. Muntean; R. Planques; A. L. D. Kilcoyne; S. R. Leone; M. K. Gilles; W. D. Hinsberg
- Publisher
- AVS (American Vacuum Society); American Vacuum Society; American Institute of Physics (ISSN 0734-211X)
- Published
- 2005
- Language
- EN
- Field
- Engineering (Physical Sciences)