About this scholarly article

2007 IEEE Instrumentation & Measurement Technology Conference IMTC 2007 - Measurement uncertainty in nanometrology: leveraging attributes of TEM and CD AFM by Liu, Hao-Chih; Dahlen, Gregory A.; Osborn, Marc; Osborne, Jason R.; Mininni, Lars; Tracy, Bryan; del Rosario, Amalia is a scholarly article available to read on EtoBox.

Author

Liu, Hao-Chih; Dahlen, Gregory A.; Osborn, Marc; Osborne, Jason R.; Mininni, Lars; Tracy, Bryan; del Rosario, Amalia

Publisher

IEEE

Published

2007

Language

EN