Skip to content

Opening book details…

About this Engineering article

Low-temperature preparation of ITO films by dual ion beam sputtering by Yoshifumi Suzaki; Tomokazu Shikama; Osamu Tanaka; Hiroshi Higuchi; Shigeaki Nakamura is a Engineering article available to read on EtoBox.

It is typically read by researchers, students, and practitioners in Engineering.

Author
Yoshifumi Suzaki; Tomokazu Shikama; Osamu Tanaka; Hiroshi Higuchi; Shigeaki Nakamura
Publisher
John Wiley and Sons; Wiley (John Wiley & Sons); Scripta Technica; Wiley (ISSN 8756-663X)
Published
1999
Language
EN
Field
Engineering (Physical Sciences)

More by Yoshifumi Suzaki; Tomokazu Shikama; Osamu Tanaka; Hiroshi Higuchi; Shigeaki Nakamura

Browse all works by Yoshifumi Suzaki; Tomokazu Shikama; Osamu Tanaka; Hiroshi Higuchi; Shigeaki Nakamura