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About this Engineering article
Room Temperature Nitridation and Oxidation of Si, Ge and Mbegrown Sige Using Low Energy Ion Beams (0.1-1 Kev). by Vancauwenberghe, O.; Hellman, O. C.; Herbots, N.; Olson, J. L.; Tan, W. J.; Croft, W. J. is a Engineering article available to read on EtoBox.
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- Author
- Vancauwenberghe, O.; Hellman, O. C.; Herbots, N.; Olson, J. L.; Tan, W. J.; Croft, W. J.
- Publisher
- Cambridge University Press; Cambridge University Press (Materials Research Society); Cambridge University Press (CUP) (ISSN 0272-9172)
- Published
- 1991
- Field
- Engineering (Physical Sciences)