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About this Engineering article
Production of polycrystalline silicon from monosilane in a fluidized bed. Effects of diluent properties on gas conversion and properties of produced silicon. by Kojima, Toshinori; Morisawa, Osamu is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Kojima, Toshinori; Morisawa, Osamu
- Publisher
- The Society of Chemical Engineers Japan; Society of Chemical Engineers Japan; Society of Chemical Engineers, Japan (ISSN 0386-216X)
- Published
- 1990
- Field
- Engineering (Physical Sciences)