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About this Engineering article
Comparison of Defects Created by Plasma-Based Ion Implantation and Conventional Implantation of Hydrogen in Germanium by David, Marie-Laure; Pailloux, Frédéric; Drouet, Michèl; Beaufort, Marie France; Barbot, Jean François; Simoen, Eddy; Claeys, C. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- David, Marie-Laure; Pailloux, Frédéric; Drouet, Michèl; Beaufort, Marie France; Barbot, Jean François; Simoen, Eddy; Claeys, C.
- Publisher
- Trans Tech Publications, Ltd.; Scientific.net; Scitec Publications Ltd. (ISSN 1662-9779)
- Published
- 2008
- Language
- EN
- Field
- Engineering (Physical Sciences)