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About this book
Simulation of conformality of ALD growth inside lateral channels: comparison between a diffusion–reaction model and a ballistic transport–reaction model by J & #xE4;nis J & #xE4;rvilehto & Jorge A. Velasco & Jihong Yim & Christine Gonsalves & Riikka L. Puurunen is a book available to read on EtoBox.
- Author
- J & #xE4;nis J & #xE4;rvilehto & Jorge A. Velasco & Jihong Yim & Christine Gonsalves & Riikka L. Puurunen
- Publisher
- Royal Society of Chemistry
- Language
- EN
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