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Effects of growth temperature on the characteristics of ZnO epitaxial films deposited by metalorganic chemical vapor deposition by B.P. Zhang; K. Wakatsuki; N.T. Binh; N. Usami; Y. Segawa is a Engineering article available to read on EtoBox.

What is Effects of growth temperature on the characteristics of ZnO epitaxial films deposited by metalorganic chemical vapor deposition about?

Growth characteristics and optical properties of ZnO films epitaxially grown on Al O (0 0 0 1) substrates at temperatures of 2 3 T s200-500 8C by metalorganic chemical vapor deposition were investigated. The in-plane orientation of ZnO unit cells was g different for T s200 8C and T 0300 8C. The surface morphology varied significantly: smooth surface with cracks at T (250 8C, facet and column growth at 300 8C(T -400 8C and grain surface for even higher growth temperatures. These results g indicate that one can obtain flat ZnO films or ZnO rods by simply selecting the growth temperature. The crystalline and optical quality became better for higher growth temperatures. Mechanisms responsible for these observations are discussed.

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Author

B.P. Zhang; K. Wakatsuki; N.T. Binh; N. Usami; Y. Segawa

Publisher

Elsevier Science; Elsevier ; Elsevier Sequoia; Elsevier BV (ISSN 0040-6090)

Published

2004

Language

EN

Field

Engineering (Physical Sciences)