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About this Engineering article
Simulation of Cluster Evaporation and Transient Enhanced Diffusion in Silicon by Rafferty, C. S.; Gilmer, G. H.; Jaraiz, M.; Eaglesham, D.; Gossmann, H.-J. is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Rafferty, C. S.; Gilmer, G. H.; Jaraiz, M.; Eaglesham, D.; Gossmann, H.-J.
- Publisher
- American Institute of Physics; AIP Publishing (ISSN 0003-6951)
- Published
- 1996
- Field
- Engineering (Physical Sciences)
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