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About this Engineering article
CMOS compatible micromachining by dry silicon-etching techniques by S. Adams; U. Hilleringmann; K. Goser is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- S. Adams; U. Hilleringmann; K. Goser
- Publisher
- Elsevier Science; Elsevier ; Elsevier BV (ISSN 0167-9317)
- Published
- 1992
- Field
- Engineering (Physical Sciences)