Opening book details…
About this Engineering article
Measurement of energy flux to a substrate by thermal and Langmuir probes during inductively coupled plasma assisted DC magnetron sputtering by Matsuda, Yoshinobu; Mine, Kenji; Wakiyama, Shintaro; Shinohara, Masanori is a Engineering article available to read on EtoBox.
It is typically read by researchers, students, and practitioners in Engineering.
- Author
- Matsuda, Yoshinobu; Mine, Kenji; Wakiyama, Shintaro; Shinohara, Masanori
- Publisher
- Institute of Pure and Applied Physics; Japan Society of Applied Physics; IOP Publishing (ISSN 0021-4922)
- Published
- 2014
- Field
- Engineering (Physical Sciences)
More by Matsuda, Yoshinobu; Mine, Kenji; Wakiyama, Shintaro; Shinohara, Masanori
Browse all works by Matsuda, Yoshinobu; Mine, Kenji; Wakiyama, Shintaro; Shinohara, Masanori