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What is Sensors 13 05720 about?

This paper discusses the design and characterization of a fully differential MEMS accelerometer created using MetalMUMPs technology. The accelerometer features a unique structural configuration that enhances sensitivity and robustness, with key metrics including a sensitivity of 0.52 mV/g and a temperature dependence of sensing capacitance at -0.021 fF/°C. The findings aim to inform the development of various sensors and actuators leveraging MetalMUMPs technology.

Author

Chao-Shiun Wang

Language

EN